Equipment: MPT RTP-600S Rapid Thermal Annealer
The system allows ultra fast heating for annealing metal contacts (silicon).
- Accessible processing temperatures from 250ºC to 1300ºC.
- The temperature ramp rate may be up to a maximum of 150ºC/sec.
- Temperature measurements: a type K thermocouple is used from 250ºC to 800ºC and a pyrometer is used from 800ºC to 1300ºC. Process data may be collected during a run cycle and stored in a data file for later display and analysis. The process and recipe data files are internally stored as DIF (Data Interchange Format) and can be exported as text files.
$30.00 per hour for UT Austin users
$54.00 per hour for external university users
$65.00 per hour for corporate users
Facility User Education
To become a user of this instrument please sign up for the next available NT201 facility user education class. Please contact Dr. Damon Smith for specific instrument training. External/Corporate users must contact CNM to setup an account before attending facility user education classes.
NT201 Cleanroom Safety Fee: $27.00
Dr. Damon Smith